Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371796 | Substrate processing apparatus, substrate processing method, and chemical liquid | Hitoshi Kosugi | 2025-07-29 |
| 12203021 | Substrate processing device and etching liquid | Koukichi Hiroshiro, Koji Kagawa, Kenji Sekiguchi, Kazuyoshi Mizumoto | 2025-01-21 |
| 11915941 | Dynamically adjusted purge timing in wet atomic layer etching | Jacques Faguet, Paul Abel | 2024-02-27 |
| 11545367 | Substrate processing apparatus, substrate processing method, and chemical liquid | Hitoshi Kosugi | 2023-01-03 |
| 11306249 | Substrate processing method, substrate processing device and etching liquid | Koukichi Hiroshiro, Koji Kagawa, Kenji Sekiguchi, Kazuyoshi Mizumoto | 2022-04-19 |
| 9111967 | Liquid processing method, liquid processing apparatus and storage medium | Kenji Sekiguchi, Yasushi Fujii | 2015-08-18 |