Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600499 | Substrate cleaning method, substrate cleaning system, and storage medium | — | 2023-03-07 |
| 11551941 | Substrate cleaning method | Koji Kagawa | 2023-01-10 |
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Satoru Tanaka | 2022-06-21 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Satoru Tanaka | 2020-10-20 |
| 10792711 | Substrate processing system, substrate cleaning method, and recording medium | Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2020-10-06 |
| 10734255 | Substrate cleaning method, substrate cleaning system and memory medium | Kenji Sekiguchi, Itaru Kanno, Kouzou Tachibana | 2020-08-04 |
| 10272478 | Substrate processing system, substrate cleaning method, and recording medium | Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2019-04-30 |
| 10121646 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Hisashi Kawano, Yuki Yoshida | 2018-11-06 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Satoru Tanaka | 2018-04-24 |
| 9870914 | Substrate processing apparatus and substrate processing method | Koji Kagawa, Hisashi Kawano, Yuki Yoshida | 2018-01-16 |
| 9818598 | Substrate cleaning method and recording medium | Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2017-11-14 |
| 9764345 | Substrate processing apparatus and nozzle cleaning method | Yoshihiro Kai, Yoshinori Ikeda, Kazuyoshi Shinohara, Tetsuya Oda, Satoru Tanaka +1 more | 2017-09-19 |
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Norihiro Ito, Hidetoshi Nakao, Kazuyoshi Shinohara, Satoru Tanaka +1 more | 2017-09-19 |