Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2022-06-21 |
| 10998183 | Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium | Takehiko Orii, Satoru Shimura, Masami Yamashita, Itaru Kanno | 2021-05-04 |
| 10835908 | Substrate processing method | Takehiko Orii, Itaru Kanno | 2020-11-17 |
| 10811264 | Film-forming method and film-forming apparatus | Yuichiro WAGATSUMA, Naotaka Noro | 2020-10-20 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2020-10-20 |
| 10535528 | Method of forming titanium oxide film and method of forming hard mask | Naoki Shindo, Toshio Hasegawa, Naotaka Noro | 2020-01-14 |
| 10392698 | Film forming method, film forming system and surface processing method | Naotaka Noro, Tsuyoshi Takahashi, Kazuyoshi Yamazaki | 2019-08-27 |
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Keiji Tanouchi, Takehiko Orii, Itaru Kanno | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Keiji Tanouchi, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |
| 9799538 | Substrate cleaning system | Takehiko Orii, Itaru Kanno | 2017-10-24 |
| 9443712 | Substrate cleaning method and substrate cleaning system | Takehiko Orii, Itaru Kanno | 2016-09-13 |
| 8969218 | Etching method, etching apparatus and storage medium | Tsukasa Watanabe, Keisuke Egashira, Takehiko Orii | 2015-03-03 |