Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332565 | Thermosetting iodine- and silicon-containing material, composition containing the material for forming resist underlayer film for EUV lithography, and patterning process | Tsutomu Ogihara, Yusuke Biyajima, Masahiro Kanayama, Ryo MITSUI | 2025-06-17 |
| 12234912 | Bearing device for vehicle wheel | — | 2025-02-25 |
| 12080910 | Wiring material and battery module | Shuzo YAMADA, Shunsuke TOMITA, Tomoki KANAYAMA | 2024-09-03 |
| 12032287 | Resist material and patterning process | Tomohiro Kobayashi, Hiroki Nonaka, Seiichiro Tachibana | 2024-07-09 |
| 11994798 | Resist material and patterning process | Tomohiro Kobayashi, Hiroki Nonaka, Seiichiro Tachibana | 2024-05-28 |
| 11914295 | Thermosetting iodine- and silicon-containing material, composition containing the material for forming resist underlayer film for EUV lithography, and patterning process | Tsutomu Ogihara, Yusuke Biyajima, Masahiro Kanayama, Ryo MITSUI | 2024-02-27 |
| 11747215 | Temperature measuring device | Shunsuke TOMITA, Shuzo YAMADA, Kenji KIYA | 2023-09-05 |
| 11614686 | Resist composition and patterning process | Hironori Satoh, Seiichiro Tachibana, Satoshi Watanabe, Tsutomu Ogihara | 2023-03-28 |
| 11592287 | Method for measuring distance of diffusion of curing catalyst | Tsutomu Ogihara, Yoshio Kawai, Tomohiro Kobayashi, Yusuke Biyajima, Masahiro Kanayama | 2023-02-28 |
| 11518774 | Method for producing iodine-containing silicon compound | Tsutomu Ogihara | 2022-12-06 |
| 11480879 | Composition for forming silicon-containing resist underlayer film and patterning process | Tsutomu Ogihara, Yusuke Biyajima, Masahiro Kanayama | 2022-10-25 |
| 11385544 | Composition for forming silicon-containing resist underlayer film and patterning process | Tsutomu Ogihara, Yusuke Biyajima, Masahiro Kanayama, Masaki Ohashi | 2022-07-12 |
| 11366386 | Patterning process | Tsutomu Ogihara | 2022-06-21 |
| 11306773 | Wheel bearing device | Ryo Konishi | 2022-04-19 |
| 11231649 | Patterning process | Tsutomu Ogihara | 2022-01-25 |
| 10959920 | Oil-in-water type emulsion cosmetic | Kahori Ishida, Takahiro KATORI | 2021-03-30 |
| 9358588 | Substrate cleaning method, substrate cleaning system and program storage medium | Naoki Shindo, Takahiro Furukawa, Yuji Kamikawa | 2016-06-07 |
| 9354085 | Angle detecting device with complex self-calibration function | — | 2016-05-31 |
| 9146136 | Axis run-out measuring method and angle detecting device with self-calibration function having axis run-out measuring function | — | 2015-09-29 |
| 9084352 | Lid member with waterproofing function | Naoya Shinmura, Hiroki Matsumoto | 2015-07-14 |
| 8969218 | Etching method, etching apparatus and storage medium | Keisuke Egashira, Miyako Kaneko, Takehiko Orii | 2015-03-03 |
| 8449684 | Substrate cleaning method, substrate cleaning system and program storage medium | Naoki Shindo | 2013-05-28 |
| 8347901 | Substrate cleaning method, substrate cleaning system and program storage medium | Naoki Shindo, Takahiro Furukawa, Yuji Kamikawa | 2013-01-08 |
| 8197606 | Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium | Naoki Shindo, Hiroki Ohno, Kenji Sekiguchi | 2012-06-12 |
| 8152928 | Substrate cleaning method, substrate cleaning system and program storage medium | Naoki Shindo, Koukichi Hiroshiro, Yuji Kamikawa | 2012-04-10 |