Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404582 | Method and apparatus for embedding ruthenium in recess formed on substrate surface | Tadahiro Ishizaka, Mikio Suzuki | 2025-09-02 |
| 12102981 | Catalyst, method for preparing catalyst, and method for producing unsaturated carboxylic acid and/or unsaturated carboxylic acid ester | Norimichi Kawabe, Akio Hayashi, Wataru Ninomiya, Masaya Fujisue | 2024-10-01 |
| 11915931 | Extreme ultraviolet lithography patterning method | Choong-Man Lee, Soo Doo Chae, Angelique Raley, Qiaowei Lou, Yoshihiro Kato | 2024-02-27 |
| 11873560 | Abnormality detection system and control board | Katsuhito Hirose, Shohei Yoshida, Takeshi Shinohara, Shinji Kawasaki | 2024-01-16 |
| 11450512 | Plasma processing method | Shinya Iwashita, Takamichi Kikuchi, Naotaka Noro, Tsuyoshi Moriya | 2022-09-20 |
| 11387112 | Surface processing method and processing system | Koichi Takatsuki, Tadahiro Ishizaka, Mikio Suzuki | 2022-07-12 |
| 11081322 | Film forming apparatus, cleaning method for film forming apparatus and recording medium | Naotaka Noro, Tamaki Takeyama, Shinya Iwashita, Katsuhito Hirose | 2021-08-03 |
| 10872764 | Film forming method | Shinya Iwashita, Takamichi Kikuchi, Naotaka Noro, Tsuyoshi Moriya | 2020-12-22 |
| 10535528 | Method of forming titanium oxide film and method of forming hard mask | Naoki Shindo, Naotaka Noro, Miyako Kaneko | 2020-01-14 |
| 10361366 | Resistive random accress memory containing a conformal titanium aluminum carbide film and method of making | Takahiro Hakamata, Genji Nakamura, Sara Aoki, Takamichi Kikuchi | 2019-07-23 |
| 10199268 | Film forming method and film forming system | Susumu YAMAUCHI, Jun LIN, Kazuaki Nishimura | 2019-02-05 |
| 9698020 | CMOS Vt control integration by modification of metal-containing gate electrodes | Genji Nakamura | 2017-07-04 |
| 9607888 | Integration of ALD barrier layer and CVD Ru liner for void-free Cu filling | Kai-Hung Yu, Tadahiro Ishizaka, Manabu Oie, Fumitaka Amano, Steven P. Consiglio +3 more | 2017-03-28 |
| 9330936 | Method for depositing metal layers on germanium-containing films using metal chloride precursors | Hideaki Yamasaki | 2016-05-03 |
| 9101067 | Method for forming copper wiring | Tadahiro Ishizaka | 2015-08-04 |
| 8846474 | Dual workfunction semiconductor devices and methods for forming thereof | Genji Nakamura | 2014-09-30 |
| 8785310 | Method of forming conformal metal silicide films | Kunihiro Tada, Hideaki Yamasaki, David L. O'Meara, Gerrit J. Leusink | 2014-07-22 |
| 8389053 | Method of cleaning powdery source supply system, storage medium, substrate processing system and substrate processing method | Tsuyoshi Moriya, Hideaki Yamasaki | 2013-03-05 |
| 8270841 | Quantum communication apparatus, quantum communication system and quantum communication method | Tsuyoshi Nishioka, Shigeki Takeuchi, Alexandre Soujaeff, Junnichi Abe | 2012-09-18 |
| 7989353 | Method for in-situ refurbishing a ceramic substrate holder | Tadahiro Ishizaka, Kentaro Asakura, Masanao Ando | 2011-08-02 |
| 7985680 | Method of forming aluminum-doped metal carbonitride gate electrodes | Gerrit J. Leusink | 2011-07-26 |
| 7935384 | Film forming method | — | 2011-05-03 |
| 7894604 | Quantum cryptographic communication apparatus | Tsuyoshi Nishioka, Hirokazu Ishizuka | 2011-02-22 |
| 7776733 | Method for depositing titanium nitride films for semiconductor manufacturing | — | 2010-08-17 |
| 7776742 | Film-forming method | — | 2010-08-17 |