Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387112 | Surface processing method and processing system | Tadahiro Ishizaka, Mikio Suzuki, Toshio Hasegawa | 2022-07-12 |
| 10309005 | Deposition device and deposition method | Yasuhiko Kojima, Hiroshi Sone, Atsushi Gomi, Kanto Nakamura, Toru Kitada +6 more | 2019-06-04 |
| 8394231 | Plasma process device and plasma process method | Hikaru Yoshitaka, Shigeo Ashigaki, Yoichi Inoue, Takashi Akahori, Shuuichi Ishizuka +7 more | 2013-03-12 |
| 8183165 | Plasma processing method | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Hikaru Adachi, Yoshihiro Sato | 2012-05-22 |
| 8076252 | Substrate processing method and substrate processing apparatus | — | 2011-12-13 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Hikaru Adachi, Yoshihiro Sato | 2011-03-01 |
| 7723241 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Hikaru Adachi, Yoshihiro Sato | 2010-05-25 |