Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8394231 | Plasma process device and plasma process method | Koichi Takatsuki, Shigeo Ashigaki, Yoichi Inoue, Takashi Akahori, Shuuichi Ishizuka +7 more | 2013-03-12 |
| 7481886 | Plasma process system and plasma process method | Yoshihiro Kato, Tadashi Goto, Makoto Aoki | 2009-01-27 |
| 6764939 | Semiconductor device and method of manufacturing the same | — | 2004-07-20 |
| 6620739 | Method of manufacturing semiconductor device | Yoshihiro Kato, Takashi Kobayashi | 2003-09-16 |