Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Taro Ikeda, Yutaka Fujino, Hiroyuki Miyashita, Yuki Osada, Nobuhiko Yamamoto | 2017-07-11 |
| 8183165 | Plasma processing method | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Koichi Takatsuki, Yoshihiro Sato | 2012-05-22 |
| 7910495 | Plasma oxidizing method, plasma processing apparatus, and storage medium | Toshihiko Shiozawa, Yoshiro Kabe, Takashi Kobayashi, Junichi Kitagawa, Nobuhiko Yamamoto | 2011-03-22 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Koichi Takatsuki, Yoshihiro Sato | 2011-03-01 |
| 7723241 | Plasma processing method and computer storage medium | Seiji Matsuyama, Toshio Nakanishi, Shigenori Ozaki, Koichi Takatsuki, Yoshihiro Sato | 2010-05-25 |
| 7226524 | Plasma processing apparatus | Shigeru Kasai, Nobuhiko Yamamoto, Yuki Osada | 2007-06-05 |