Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243718 | Plasma processing method and plasma processing apparatus | Eiki KAMATA, Mikio Sato, Taro Ikeda | 2025-03-04 |
| 12046453 | Plasma processing apparatus | Taro Ikeda, Atsushi Kubo, Eiki KAMATA | 2024-07-23 |
| 11967485 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Taro Ikeda, Mikio Sato | 2024-04-23 |
| 11476088 | Array antenna and plasma processing apparatus | Eiki KAMATA, Taro Ikeda, Mikio Sato | 2022-10-18 |
| 10319567 | Microwave plasma source and plasma processing apparatus | Taro Ikeda, Akira Tanihara, Shigeru Kasai | 2019-06-11 |
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Taro Ikeda, Yutaka Fujino, Hikaru Adachi, Hiroyuki Miyashita, Yuki Osada | 2017-07-11 |
| 8267040 | Plasma processing apparatus and plasma processing method | Kiyotaka Ishibashi, Junichi Kitagawa, Singo Furui, Cai Zhong Tian, Jun Yamashita +4 more | 2012-09-18 |
| 7910495 | Plasma oxidizing method, plasma processing apparatus, and storage medium | Toshihiko Shiozawa, Yoshiro Kabe, Takashi Kobayashi, Hikaru Adachi, Junichi Kitagawa | 2011-03-22 |
| 7226524 | Plasma processing apparatus | Shigeru Kasai, Hikaru Adachi, Yuki Osada | 2007-06-05 |
| 5749396 | Pressurized fluid supply hose and method of manufacturing the same | Hiroyuki Takahashi | 1998-05-12 |