Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11692269 | Plasma processing apparatus | Hiroyuki Matsuura | 2023-07-04 |
| 10570512 | Substrate processing apparatus | Toshihiko Iwao, Takahiro HIRANO, Satoru Kawakami | 2020-02-25 |
| 10388557 | Placing bed structure, treating apparatus using the structure, and method for using the apparatus | Kohei Kawamura, Yasuo Kobayashi, Toshihisa Nozawa | 2019-08-20 |
| 9767993 | Plasma processing apparatus | Osamu Morita | 2017-09-19 |
| 9767994 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka, Toshihisa Nozawa +1 more | 2017-09-19 |
| 9670584 | Plasma processing device | — | 2017-06-06 |
| 9595425 | Antenna, dielectric window, plasma processing apparatus and plasma processing method | Naoki Matsumoto, Wataru Yoshikawa, Jun Yoshikawa, Kazuki Moyama, Osamu Morita +1 more | 2017-03-14 |
| 9418822 | Plasma processing apparatus, plasma processing method and high frequency generator | Kazushi Kaneko, Naoki Matsumoto, Koji Koyama, Kazunori Funazaki, Hideo Kato | 2016-08-16 |
| 9237638 | Plasma processing apparatus and substrate processing method | Osamu Morita | 2016-01-12 |
| 9177846 | Placing bed structure, treating apparatus using the structure, and method for using the apparatus | Kohei Kawamura, Yasuo Kobayashi, Toshihisa Nozawa | 2015-11-03 |
| 9111726 | Plasma processing apparatus | Kazuki Moyama, Osamu Morita, Takehiro Tanikawa, Naoki Matsumoto, Naoki Mihara +1 more | 2015-08-18 |
| 8967080 | Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method | Caizhong Tian, Toshihisa Nozawa | 2015-03-03 |
| 8925351 | Manufacturing method of top plate of plasma processing apparatus | Caizhong Tian, Toshihisa Nozawa | 2015-01-06 |
| 8915999 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka, Toshihisa Nozawa +1 more | 2014-12-23 |
| 8419859 | Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method | Noriaki Fukiage, Shinji Komoto, Hiroyuki Takaba | 2013-04-16 |
| 8387560 | Plasma processing unit | Caizhong Tian, Junichi Kitagawa, Toshihisa Nozawa | 2013-03-05 |
| 8372200 | Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method | Masahiro Okesaku, Tetsuya Goto, Tadahiro Ohmi | 2013-02-12 |
| 8343308 | Ceiling plate and plasma process apparatus | Caizhong Tian, Tetsuya Nishizuka, Toshihisa Nozawa | 2013-01-01 |
| 8273210 | Plasma processing apparatus and method for adjusting plasma density distribution | Caizhong Tian, Toshihisa Nozawa | 2012-09-25 |
| 8267042 | Plasma processing apparatus and plasma processing method | — | 2012-09-18 |
| 8267040 | Plasma processing apparatus and plasma processing method | Junichi Kitagawa, Singo Furui, Cai Zhong Tian, Jun Yamashita, Nobuhiko Yamamoto +4 more | 2012-09-18 |
| 8069704 | Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure | Yoshiharu Kishida | 2011-12-06 |
| 7940009 | Plasma processing apparatus | Toshihisa Nozawa | 2011-05-10 |
| 7930992 | Plasma processing equipment | Toshihisa Nozawa | 2011-04-26 |
| 7828927 | Plasma processing device | Toshihisa Nozawa | 2010-11-09 |