Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230483 | Deposition method and processing apparatus | — | 2025-02-18 |
| 11984300 | Plasma processing apparatus | Shuhei Yamabe, Yohei Uchida, Yasuharu Sasaki | 2024-05-14 |
| 11978614 | Substrate processing apparatus | Yusuke Hayasaka, Jun Young Chung, Shuhei Yamabe, Keiichi Yamaguchi | 2024-05-07 |
| 11869750 | Plasma processing apparatus | Yusuke Hayasaka, Shuhei Yamabe, Yuki Machida, Jun Young Chung | 2024-01-09 |
| 11264260 | Cleaning method and substrate processing apparatus | — | 2022-03-01 |
| 11257691 | Substrate processing apparatus | — | 2022-02-22 |
| 10923328 | Plasma processing method and plasma processing apparatus | Shinji Kawada, Takayuki Semoto | 2021-02-16 |
| 10825662 | Method for driving member and processing apparatus | Rumiko MORIYA, Takanori BANSE, Suguru Sato, Yuuji AKIDUKI | 2020-11-03 |
| 9892951 | Method of controlling adherence of microparticles to substrate to be processed, and processing apparatus | Kazuki Moyama | 2018-02-13 |
| 9728417 | Method for processing base body to be processed | Masaki Inoue, Toshihisa Ozu, Jun Yoshikawa | 2017-08-08 |
| 9595425 | Antenna, dielectric window, plasma processing apparatus and plasma processing method | Naoki Matsumoto, Wataru Yoshikawa, Jun Yoshikawa, Kazuki Moyama, Kiyotaka Ishibashi +1 more | 2017-03-14 |
| 9111726 | Plasma processing apparatus | Kazuki Moyama, Kiyotaka Ishibashi, Osamu Morita, Naoki Matsumoto, Naoki Mihara +1 more | 2015-08-18 |
| 9048070 | Dielectric window for plasma treatment device, and plasma treatment device | Caizhong Tian, Naoki Matsumoto, Koji Koyama, Naoki Mihara, Kazuki Takahashi +2 more | 2015-06-02 |