Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243723 | Plasma processing apparatus | Atsushi Sasaki, Kazuya Matsumoto, Shingo Takahashi, Koichi Nagami | 2025-03-04 |
| 11978614 | Substrate processing apparatus | Jun Young Chung, Shuhei Yamabe, Keiichi Yamaguchi, Takehiro Tanikawa | 2024-05-07 |
| 11869750 | Plasma processing apparatus | Takehiro Tanikawa, Shuhei Yamabe, Yuki Machida, Jun Young Chung | 2024-01-09 |
| 11715630 | Plasma processing apparatus | Shuhei Yamabe, Naoki Tamaru, Keisuke YOSHIMURA, Kyo Tsuboi | 2023-08-01 |
| 10529599 | Substrate processing apparatus and shutter member | Toshinori KITABATA, Kazuya Matsumoto | 2020-01-07 |