Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984300 | Plasma processing apparatus | Takehiro Tanikawa, Yohei Uchida, Yasuharu Sasaki | 2024-05-14 |
| 11978614 | Substrate processing apparatus | Yusuke Hayasaka, Jun Young Chung, Keiichi Yamaguchi, Takehiro Tanikawa | 2024-05-07 |
| 11869750 | Plasma processing apparatus | Yusuke Hayasaka, Takehiro Tanikawa, Yuki Machida, Jun Young Chung | 2024-01-09 |
| 11715630 | Plasma processing apparatus | Yusuke Hayasaka, Naoki Tamaru, Keisuke YOSHIMURA, Kyo Tsuboi | 2023-08-01 |
| 11532461 | Substrate processing apparatus | Michishige Saito, Shota Kaneko | 2022-12-20 |
| 10847348 | Plasma processing apparatus and plasma processing method | Toshiya Tsukahara, Kota Yachi, Tetsuji Sato, Yohei Uchida, Ayuta Suzuki +3 more | 2020-11-24 |