Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340985 | Plasma processing apparatus and plasma processing method | — | 2025-06-24 |
| 11961718 | Plasma processing method and plasma processing apparatus | Shojiro Yahata | 2024-04-16 |
| 11825589 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Shojiro Yahata, Taira Takase | 2023-11-21 |
| 11257662 | Annular member, plasma processing apparatus and plasma etching method | Shingo Kitamura, Koichi Kazama, Masahiro Ogasawara, Susumu Nogami | 2022-02-22 |
| 11032899 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Shojiro Yahata, Taira Takase | 2021-06-08 |
| 10847348 | Plasma processing apparatus and plasma processing method | Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Yohei Uchida, Ayuta Suzuki +3 more | 2020-11-24 |
| 9455125 | Substrate processing apparatus | Akihiro Yoshimura, Masato Horiguchi, Nobuhiro Wada, Makoto Kobayashi, Hiroshi Tsujimoto +2 more | 2016-09-27 |
| D709536 | Focusing ring | Akihiro Yoshimura, Masaaki Miyagawa | 2014-07-22 |
| 8727708 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi, Eiichi Sugawara, Shosuke Endoh +1 more | 2014-05-20 |
| 8687343 | Substrate mounting table of substrate processing apparatus | Takashi Kitazawa, Akihiro Yoshimura | 2014-04-01 |
| 8524005 | Heat-transfer structure and substrate processing apparatus | Masaaki Miyagawa | 2013-09-03 |
| 8173036 | Plasma processing method and apparatus | Masanobu Honda, Shin Matsuura, Yutaka Matsui | 2012-05-08 |
| 8083891 | Plasma processing apparatus and the upper electrode unit | — | 2011-12-27 |
| 8077761 | Data transmission and reception module, and method of adjusting reception threshold value thereof | — | 2011-12-13 |
| 7927066 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi, Eiichi Sugawara, Shosuke Endoh +1 more | 2011-04-19 |
| 7837432 | Exhaust system and exhausting pump connected to a processing chamber of a substrate processing apparatus | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi | 2010-11-23 |
| 7815767 | Plasma processing apparatus | — | 2010-10-19 |
| 7707924 | Linear actuator | Hiroshi Yamanouchi, Katsutoshi Tada, Masaru Oono | 2010-05-04 |
| 7513112 | Reservoir built-in type actuator | Masahito Kamada | 2009-04-07 |
| 7438783 | Plasma processing apparatus and plasma processing method | Koji Miyata | 2008-10-21 |
| 7382987 | Identification level control method and optical receiver | Setsuo Misaizu, Yuko Yoshida | 2008-06-03 |
| D495008 | India ink container | — | 2004-08-24 |
| D493489 | India ink container | — | 2004-07-27 |
| 5808571 | Synchronization control unit which maintains synchronization between serial-to-parallel converters operating in parallel, or between parallel-to-serial converters operating in parallel | Naoki Kuwata, Noriaki Mizuguchi, Tetsuya Kiyonaga | 1998-09-15 |
| 5767396 | Method and device for measuring fuel injection timing | Ryuji Okamoto, Kazumi Umeki, Takeshi Takahashi, Naoyuki Tsuzuki, Shunsuke Yasunishi +2 more | 1998-06-16 |