Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257662 | Annular member, plasma processing apparatus and plasma etching method | Shingo Kitamura, Masahiro Ogasawara, Susumu Nogami, Tetsuji Sato | 2022-02-22 |
| 9466468 | Shower head, plasma processing apparatus and plasma processing method | Nobuyuki Okayama, Shuichiro Uda, Satoshi Yamada, Shinji Fuchigami | 2016-10-11 |
| RE40046 | Processing system | Nobuyuki Okayama, Hidehito Saegusa, Jun Ozawa, Daisuke Hayashi, Naoki Takayama | 2008-02-12 |
| RE39969 | Processing system | Nobuyuki Okayama, Hidehito Saegusa, Jun Ozawa, Daisuke Hayashi, Naoki Takayama | 2008-01-01 |
| RE39939 | Processing system | Nobuyuki Okayama, Hidehito Saegusa, Jun Ozawa, Daisuke Hayashi, Naoki Takayama | 2007-12-18 |
| 6383333 | Protective member for inner surface of chamber and plasma processing apparatus | Kazuyoshi Haino | 2002-05-07 |
| 6334983 | Processing system | Nobuyuki Okayama, Hidehito Saegusa, Jun Ozawa, Daisuke Hayashi, Naoki Takayama | 2002-01-01 |
| 5376213 | Plasma processing apparatus | Yoichi Ueda, Mitsuaki Komino | 1994-12-27 |