Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443952 | Etching method and etching device | Akitaka Shimizu, Takeshi Saito, Taiki KATO | 2022-09-13 |
| 10910229 | Substrate treatment method | Koichi Nagakura, Tamotsu Morimoto, Takeshi Saito | 2021-02-02 |
| 9466468 | Shower head, plasma processing apparatus and plasma processing method | Nobuyuki Okayama, Koichi Kazama, Satoshi Yamada, Shinji Fuchigami | 2016-10-11 |
| 9048191 | Plasma etching method | Takaaki Nezu, Shinji Fuchigami, Koji Maruyama | 2015-06-02 |
| 8716144 | Method for manufacturing semiconductor device | Koji Maruyama, Yusuke Hirayama | 2014-05-06 |