Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237173 | Substrate processing method, substrate processing apparatus and substrate processing system | Keiko Hada, Akitaka Shimizu, Mitsuhiro Tachibana | 2025-02-25 |
| 11024514 | Etching method and etching apparatus | Takuya Abe, Hidenori Miyoshi, Akitaka Shimizu | 2021-06-01 |
| 10910229 | Substrate treatment method | Tamotsu Morimoto, Shuichiro Uda, Takeshi Saito | 2021-02-02 |
| 10903083 | Substrate processing method, substrate processing apparatus and substrate processing system | Keiko Hada, Akitaka Shimizu, Mitsuhiro Tachibana | 2021-01-26 |
| 10192774 | Temperature control device for processing target object and method of selectively etching nitride film from multilayer film | Yuki Hosaka, Yoshihiro Umezawa, Toshiki Nakajima | 2019-01-29 |
| 8124539 | Plasma processing apparatus, focus ring, and susceptor | Shosuke Endoh, Noriyuki Iwabuchi, Shigeaki Kato, Tomoya Okubo, Jun Hirose +2 more | 2012-02-28 |
| 8071473 | Semiconductor device manufacturing method and storage medium | Kazuki Narishige | 2011-12-06 |
| 5753365 | Rubber composition and all season type pneumatic tires made from a rubber composition | Yoshiyuki Morimoto, Koji Yamauchi, Seiichiro Iwafune, Tatsuro Hamada, Masanori Aoyama +2 more | 1998-05-19 |
| 4602063 | Production of reinforced rubber composition | Shinji Yamamoto, Kohei Kaijiri | 1986-07-22 |