Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374531 | Plasma processing apparatus | Hwajun JUNG, Mitsunori Ohata | 2025-07-29 |
| 12347654 | Plasma processing apparatus | Hwajun JUNG, Masahiro Suzuki, Mitsunori Ohata | 2025-07-01 |
| 12334313 | Plasma processing apparatus and plasma processing method | Hwajun JUNG, Mitsunori Ohata, Wan Sung Jin | 2025-06-17 |
| 11804366 | Plasma processing apparatus | Yoshihiro Umezawa, Toshiki Nakajima | 2023-10-31 |
| 11348768 | Plasma processing apparatus | Yoshihiro Umezawa, Toshiki Nakajima, Mayo UDA | 2022-05-31 |
| 11101114 | Plasma processing apparatus | Yoshihiro Umezawa, Toshiki Nakajima | 2021-08-24 |
| 10950467 | Gas supply mechanism and semiconductor manufacturing system | Yoshihiro Umezawa, Toshiki Nakajima, Mayo UDA, Kenichi Shimono | 2021-03-16 |
| 10541142 | Maintenance method of plasma processing apparatus | Kazuya Matsumoto, Mitsunori Ohata, Takashi Yamamoto | 2020-01-21 |
| 10510514 | Gas supply mechanism and semiconductor manufacturing apparatus | Yoshihiro Umezawa, Mayo UDA, Takashi Kubo | 2019-12-17 |
| 10192774 | Temperature control device for processing target object and method of selectively etching nitride film from multilayer film | Yoshihiro Umezawa, Toshiki Nakajima, Koichi Nagakura | 2019-01-29 |
| 9589771 | Plasma processing apparatus | Naokazu Furuya, Mitsunori Ohata | 2017-03-07 |
| 9011635 | Plasma processing apparatus | Naokazu Furuya, Mitsunori Ohata | 2015-04-21 |