Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950467 | Gas supply mechanism and semiconductor manufacturing system | Yuki Hosaka, Yoshihiro Umezawa, Toshiki Nakajima, Mayo UDA | 2021-03-16 |
| 10204766 | Ion beam irradiation apparatus and substrate processing apparatus | Yoshihiro Umezawa, Mitsunori Ohata, Shinji Nagamachi | 2019-02-12 |