Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394600 | Balanced RF resonant antenna system | Qiang Wang, Michael Hummel, Peter Ventzek, Shyam Sridhar | 2025-08-19 |
| 12394629 | Plasma processing methods using low frequency bias pulses | Alok Ranjan, Peter Ventzek | 2025-08-19 |
| 12374531 | Plasma processing apparatus | Hwajun JUNG, Yuki Hosaka | 2025-07-29 |
| 12347646 | Plasma processing apparatus | Bongseong KIM, Masahiro Inoue, Ken Kobayashi | 2025-07-01 |
| 12347654 | Plasma processing apparatus | Hwajun JUNG, Masahiro Suzuki, Yuki Hosaka | 2025-07-01 |
| 12334313 | Plasma processing apparatus and plasma processing method | Hwajun JUNG, Yuki Hosaka, Wan Sung Jin | 2025-06-17 |
| 12300468 | Method of uniformity control | Shyam Sridhar, Ya-Ming Chen, Peter Ventzek, Alok Ranjan | 2025-05-13 |
| 12230475 | Systems and methods of control for plasma processing | Alok Ranjan, Peter Ventzek | 2025-02-18 |
| 12183583 | Remote source pulsing with advanced pulse control | Peter Ventzek, Alok Ranjan | 2024-12-31 |
| 12154761 | Plasma processing apparatus and plasma processing method | Naoki Fujiwara, Takahiro Takeuchi | 2024-11-26 |
| 11972925 | Plasma processing apparatus and plasma processing method | Bong seong Kim, Ken Kobayashi, Yoon Ho Bae | 2024-04-30 |
| 11915910 | Fast neutral generation for plasma processing | Peter Ventzek, Alok Ranjan | 2024-02-27 |
| 11817295 | Three-phase pulsing systems and methods for plasma processing | Peter Ventzek, Alok Ranjan | 2023-11-14 |
| 11798787 | Plasma processing apparatus and plasma processing method | Naoki Fujiwara, Takahiro Takeuchi | 2023-10-24 |
| 11521834 | Plasma processing systems and methods for chemical processing a substrate | Peter Ventzek, Alok Ranjan | 2022-12-06 |
| 11450515 | Plasma processing apparatus | Kazuya Nagaseki, Shinji Himori | 2022-09-20 |
| 11251021 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Alok Ranjan, Michael Hummel | 2022-02-15 |
| 11158516 | Plasma processing methods using low frequency bias pulses | Alok Ranjan, Peter Ventzek | 2021-10-26 |
| 10910196 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Alok Ranjan, Michael Hummel | 2021-02-02 |
| 10825663 | Plasma processing apparatus | Kazuya Nagaseki, Shinji Himori | 2020-11-03 |
| 10685816 | Method of etching object to be processed | Yoshihiro Umezawa, Jun Sato, Kiyoshi Maeda, Kazuya Matsumoto | 2020-06-16 |
| 10541142 | Maintenance method of plasma processing apparatus | Kazuya Matsumoto, Yuki Hosaka, Takashi Yamamoto | 2020-01-21 |
| 10217933 | Method for etching multilayer film | Eiichi Nishimura | 2019-02-26 |
| 10204766 | Ion beam irradiation apparatus and substrate processing apparatus | Yoshihiro Umezawa, Shinji Nagamachi, Kenichi Shimono | 2019-02-12 |
| 10020172 | Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method | Hidetoshi Kimura, Kiyoshi Maeda, Jun Hirose, Tsuyoshi Hida | 2018-07-10 |