Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347646 | Plasma processing apparatus | Masahiro Inoue, Mitsunori Ohata, Ken Kobayashi | 2025-07-01 |
| 12327709 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Je-Hun WOO, Juho Lee, Yun-Kwang Jeon +1 more | 2025-06-10 |
| 10971333 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Je-Hun WOO, Juho Lee, Yun-Kwang Jeon +1 more | 2021-04-06 |
| 9704690 | Plasma apparatus and method of operating the same | Moojin Kim, Unjoo Lee | 2017-07-11 |
| 9490107 | Plasma apparatus and method of fabricating semiconductor device using the same | Moojin Kim, DeogJa Koo, Je-Hun WOO, Unjoo Lee | 2016-11-08 |