Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327709 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Je-Hun WOO, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2025-06-10 |
| 12210045 | Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig | Byeongsang Kim, Sungjin Kim, Yunhwan Kim, Inseok Seo, Seungbo Shim +2 more | 2025-01-28 |
| 12020903 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Donghyeon Na, Seungbo Shim +3 more | 2024-06-25 |
| 11948777 | Method of manufacturing semiconductor device | Yonghee Kim, Taekjoon Rhee, Sungwook Hong, Hakyoung Kim, Sangmin JEONG | 2024-04-02 |
| 11658039 | Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching method | Kyuho Kim, Nam-Kyun Kim, Sungjun Ann, Myungsun Choi, Seungbo Shim | 2023-05-23 |
| 11605529 | Plasma processing apparatus | Hakyoung Kim, Kyeongtea Bang | 2023-03-14 |
| 11545341 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Donghyeon Na, Seungbo Shim +3 more | 2023-01-03 |
| 11384433 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Minkyu SUNG, Sung-Ki Lee, Sang Ho Lee, Kangmin Jeon | 2022-07-12 |
| 11282679 | Plasma control apparatus and plasma processing system including the same | Donghyeon Na, Hyosin KIM, Seungbo Shim, Hadong JIN, Minyoung Hur | 2022-03-22 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Jongwoo Sun, Minkyu SUNG, Kimoon Jung, Seongha JEONG +2 more | 2022-02-15 |
| 11075088 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2021-07-27 |
| 11075089 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2021-07-27 |
| 10971333 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Je-Hun WOO, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2021-04-06 |
| 10934621 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Minkyu SUNG, Sung-Ki Lee, Sang Ho Lee, Kangmin Jeon | 2021-03-02 |
| 10896838 | Electrostatic chucks and substrate processing apparatus including the same | Minsung Kim, Myoung Soo Park, Yun-Kwang Jeon | 2021-01-19 |
| 10892145 | Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same | Sejin OH, Kyohyeok Kim, Jongwoo Sun, Sung-Ki Lee, Jaehyun Lee | 2021-01-12 |
| 10854485 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dongyun Yeo, Suho LEE, Yun-Kwang Jeon | 2020-12-01 |
| 10622217 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2020-04-14 |
| 10522374 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dongyun Yeo, Suho LEE, Yun-Kwang Jeon | 2019-12-31 |
| 10224228 | Electrostatic chucks and substrate processing apparatus including the same | Minsung Kim, Myoung Soo Park, Yun-Kwang Jeon | 2019-03-05 |
| 9691618 | Methods of fabricating semiconductor devices including performing an atomic layer etching process | Sejin OH, Je-Hun WOO, Hyunju Lee, Seungkyu LIM, Kiho Hwang | 2017-06-27 |
| 9355857 | Substrate manufacturing method and substrate manufacturing apparatus | Kangmin Jeon, Kyung-Sun Kim, Tae Hwa Kim, Heungsik PARK, Jung Min Kim | 2016-05-31 |
| 7442114 | Methods for silicon electrode assembly etch rate and etch uniformity recovery | Tuochuan Huang, Daxing Ren, Hong Shih, Catherine Zhou, Chun Yan +4 more | 2008-10-28 |