Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Dougyong Sung, Jongwoo Sun, Minkyu SUNG, Kimoon Jung +2 more | 2022-02-15 |
| 10818503 | Method of etching at low temperature and plasma etching apparatus | Cheonkyu Lee, Moonseok Kim, Iksu Byun, Changwoo SONG, Dongseok Han | 2020-10-27 |