Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106945 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Siqing Lu, Takafumi Noguchi | 2024-10-01 |
| 11244839 | Plasma processing apparatus | Siqing Lu, Takafumi Noguchi | 2022-02-08 |
| 10818503 | Method of etching at low temperature and plasma etching apparatus | Moonseok Kim, Iksu Byun, Changwoo SONG, Seongha JEONG, Dongseok Han | 2020-10-27 |