Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11929239 | Plasma processing apparatus and semiconductor device manufacturing method using the same | Sejin OH, Taemin Earmme, Jongwoo Sun, Jewoo Han | 2024-03-12 |
| 10818503 | Method of etching at low temperature and plasma etching apparatus | Cheonkyu Lee, Moonseok Kim, Changwoo SONG, Seongha JEONG, Dongseok Han | 2020-10-27 |