Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315703 | Plasma processing apparatus and methods of manufacturing semiconductor device using the same | Kyoungchon Kim, Taemin Earmme, Kwangnam Kim | 2025-05-27 |
| 12211672 | Apparatus and method for plasma etching | Kyohyeok Kim, Taehwa Kim, Haejoong Park, Jewoo Han | 2025-01-28 |
| 12087554 | Substrate treating apparatus and substrate treating system having the same | Sungyeon KIM, Jungpyo Hong, Kwangnam Kim, Hyungjun Kim | 2024-09-10 |
| 12068140 | Method and system for monitoring substrate processing apparatus | Sejin OH, Taemin Earmme, Eunwoo Lee | 2024-08-20 |
| 11984304 | Apparatus and method for plasma etching | Kyohyeok Kim, Taehwa Kim, Haejoong Park, Jewoo Han | 2024-05-14 |
| 11929239 | Plasma processing apparatus and semiconductor device manufacturing method using the same | Sejin OH, Iksu Byun, Taemin Earmme, Jewoo Han | 2024-03-12 |
| 11862440 | Semiconductor processing equipment including electrostatic chuck for plasma processing | Jeongil Mun, Jinyoung Park, Hyungjoo Lee | 2024-01-02 |
| 11715628 | Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same | Jeongil Mun, Kyeonghun Kim, Taekyoon PARK, Seeyub Yang, Yongseok Lee +2 more | 2023-08-01 |
| 11450545 | Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same | Incheol Song, Hongmin Yoon, Jihyun Lim, Masayuki Tomoyasu, Jewoo Han | 2022-09-20 |
| 11430679 | Semiconductor manufacturing apparatus | Kwangnam Kim, Nohsung Kwak, Sungyeon KIM, Hyungjun Kim, Haejoong Park +3 more | 2022-08-30 |
| 11348760 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Akira Koshiishi, Masato Horiguchi, YongWoo Lee, Kyohyeok Kim, Dowon Kim +3 more | 2022-05-31 |
| 11264291 | Sensor device and etching apparatus having the same | Seeyub Yang, Jeongil Mun, Hyungjoo Lee, Kyoungsuk Kim, Kyeonghun Kim | 2022-03-01 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Dougyong Sung, Minkyu SUNG, Kimoon Jung, Seongha JEONG +2 more | 2022-02-15 |
| 11215506 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Kyeonghun Kim, Jeongil Mun, Hyung Joo Lee | 2022-01-04 |
| 11092495 | Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device | Jeongil Mun, Hyung Joo Lee | 2021-08-17 |
| 10935429 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Kyeonghun Kim, Jeongil Mun, Hyung Joo Lee | 2021-03-02 |
| 10892145 | Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same | Sejin OH, Kyohyeok Kim, Dougyong Sung, Sung-Ki Lee, Jaehyun Lee | 2021-01-12 |
| 10861724 | Substrate inspection apparatus and substrate processing system including the same | Hakyoung Kim, Yun-Kwang Jeon, Wonyoung Jee | 2020-12-08 |
| 10643858 | Method of etching substrate | Eunwoo Lee, Sangrok Oh, Jungmo Sung | 2020-05-05 |
| 10431432 | Plasma treatment system including cover plate to insulate window | Hakyoung Kim | 2019-10-01 |