Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211672 | Apparatus and method for plasma etching | Jongwoo Sun, Taehwa Kim, Haejoong Park, Jewoo Han | 2025-01-28 |
| 11984304 | Apparatus and method for plasma etching | Jongwoo Sun, Taehwa Kim, Haejoong Park, Jewoo Han | 2024-05-14 |
| 11515193 | Etching apparatus | Kuihyun Yoon, Jaehak Lee, Yunhwan Kim, Jongkeun Lee, Jewoo Han | 2022-11-29 |
| 11348760 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Akira Koshiishi, Masato Horiguchi, YongWoo Lee, Dowon Kim, Yunhwan Kim +3 more | 2022-05-31 |
| 10892145 | Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same | Sejin OH, Jongwoo Sun, Dougyong Sung, Sung-Ki Lee, Jaehyun Lee | 2021-01-12 |
| 9812335 | Method of forming fine pattern of semiconductor device | Je-Woo Han, Junho Yoon, Dongchan Kim, Sungyeon KIM, Jaehong Park +2 more | 2017-11-07 |