Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Namkyun Kim, Seungbo Shim, Donghyeon Na, Naohiko Okunishi +3 more | 2025-02-11 |
| 12183555 | Substrate processing apparatus and method of manufacturing semiconductor device using the same | Seunghan Baek, Sangki Nam, Dongseok Han, Namkyun Kim, Kwonsang Seo | 2024-12-31 |
| 11515193 | Etching apparatus | Jaehak Lee, Yunhwan Kim, Jongkeun Lee, Kyohyeok Kim, Jewoo Han | 2022-11-29 |
| 10532896 | Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection system | Wonguk Seo, Young Heo | 2020-01-14 |
| 10006872 | Optical inspection system | Wonguk Seo, Kyoungchon Kim, Kyunlae Kim, Jaeyoung Park, Kyoungho Yang +1 more | 2018-06-26 |