Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Namkyun Kim, Seungbo Shim, Naohiko Okunishi, Dongseok Han +3 more | 2025-02-11 |
| 12020903 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Dougyong Sung, Seungbo Shim +3 more | 2024-06-25 |
| 12014905 | Apparatus and method fabricating semiconductor device | Nam-Kyun Kim, Tae Shin, Deokjin Kwon, Seungbo Shim, Sungyong Lim +6 more | 2024-06-18 |
| 11545341 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Dougyong Sung, Seungbo Shim +3 more | 2023-01-03 |
| 11367597 | Electrostatic chuck and plasma processing apparatus including the same | YongWoo Lee, Youngjin Noh, Dowon Kim, Seungbo Shim | 2022-06-21 |
| 11282679 | Plasma control apparatus and plasma processing system including the same | Hyosin KIM, Seungbo Shim, Hadong JIN, Dougyong Sung, Minyoung Hur | 2022-03-22 |