Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288674 | Hybrid matcher and radio frequency matching system including the hybrid matcher | Sungyong Lim, Minsung Kim, Dongyub Kim, Sungyeol Kim, Jongbeom MOON +1 more | 2025-04-29 |
| 11282679 | Plasma control apparatus and plasma processing system including the same | Donghyeon Na, Seungbo Shim, Hadong JIN, Dougyong Sung, Minyoung Hur | 2022-03-22 |