Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424412 | Apparatus for providing RF power and operating method thereof | Siyoung Koh, Hadong JIN, Seungbo Shim, Sungyong Lim, Sungyeol Kim | 2025-09-23 |
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Seungbo Shim, Donghyeon Na, Naohiko Okunishi, Dongseok Han +3 more | 2025-02-11 |
| 12183555 | Substrate processing apparatus and method of manufacturing semiconductor device using the same | Seunghan Baek, Sangki Nam, Dongseok Han, Kwonsang Seo, Kuihyun Yoon | 2024-12-31 |
| 11996275 | Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof | Sungyong Lim, Chansoo Kang, Youngdo Kim, Sungyeol Kim, Sangki Nam +2 more | 2024-05-28 |