| 12431341 |
Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method |
Changsoon Lim, Youngdo Kim, Daewon Kang, Kyunghyun Kim, Sangki Nam +3 more |
2025-09-30 |
| 12087550 |
Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same |
Vladimir Protopopov, Vasily Pashkovskiy, Youngdo Kim, Hoonseop KIM, Sangki Nam +2 more |
2024-09-10 |
| 11996275 |
Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof |
Sungyong Lim, Youngdo Kim, Namkyun Kim, Sungyeol Kim, Sangki Nam +2 more |
2024-05-28 |
| 11940620 |
Method of cleaning collector of EUV light source system |
Changsoon Lim, Youngdo Kim, Daewon Kang, Hoonseop KIM, Sangki Nam +3 more |
2024-03-26 |
