Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431341 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Changsoon Lim, Youngdo Kim, Daewon Kang, Kyunghyun Kim, Sangki Nam +3 more | 2025-09-30 |
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vladimir Protopopov, Vasily Pashkovskiy, Youngdo Kim, Hoonseop KIM, Sangki Nam +2 more | 2024-09-10 |
| 11996275 | Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof | Sungyong Lim, Youngdo Kim, Namkyun Kim, Sungyeol Kim, Sangki Nam +2 more | 2024-05-28 |
| 11940620 | Method of cleaning collector of EUV light source system | Changsoon Lim, Youngdo Kim, Daewon Kang, Hoonseop KIM, Sangki Nam +3 more | 2024-03-26 |