Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431341 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Kyunghyun Kim +3 more | 2025-09-30 |
| 12183555 | Substrate processing apparatus and method of manufacturing semiconductor device using the same | Seunghan Baek, Dongseok Han, Namkyun Kim, Kwonsang Seo, Kuihyun Yoon | 2024-12-31 |
| 12125687 | System of semiconductor process and control method thereof | Youngdo Kim, Sungyong Lim, Daewon Kang, Sungyeol Kim, Myunggeun Song +3 more | 2024-10-22 |
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vladimir Protopopov, Vasily Pashkovskiy, Chansoo Kang, Youngdo Kim, Hoonseop KIM +2 more | 2024-09-10 |
| 11996275 | Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof | Sungyong Lim, Chansoo Kang, Youngdo Kim, Namkyun Kim, Sungyeol Kim +2 more | 2024-05-28 |
| 11940620 | Method of cleaning collector of EUV light source system | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Hoonseop KIM +3 more | 2024-03-26 |
| 11869751 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Jungmin Ko, Kwonsang Seo, Seungbo Shim, Younghyun JO | 2024-01-09 |
| 11705306 | Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same | Hyunbae Kim, Hyunjae Lee, Youngdo Kim, Hyejin Kim, Chanhee Park +1 more | 2023-07-18 |
| 11545344 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Jungmin Ko, Kwonsang Seo, Seungbo Shim, Younghyun JO | 2023-01-03 |
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Dongkyu Shin, Soonam Park, Akira Koshiishi, Kyuhee Han | 2021-12-07 |