Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990348 | Wafer processing apparatus and wafer processing method using the same | Chanyeong Jeong, Hoseop Choi, Sunggil Kang, Sangjin An | 2024-05-21 |
| 11195696 | Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same | Sangki Nam, Soonam Park, Akira Koshiishi, Kyuhee Han | 2021-12-07 |