Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869751 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Sangki Nam, Jungmin Ko, Kwonsang Seo, Seungbo Shim | 2024-01-09 |
| 11545344 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Sangki Nam, Jungmin Ko, Kwonsang Seo, Seungbo Shim | 2023-01-03 |