Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431341 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Youngdo Kim, Daewon Kang, Chansoo Kang, Kyunghyun Kim, Sangki Nam +3 more | 2025-09-30 |
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vladimir Protopopov, Vasily Pashkovskiy, Chansoo Kang, Youngdo Kim, Hoonseop KIM +2 more | 2024-09-10 |
| 11940620 | Method of cleaning collector of EUV light source system | Youngdo Kim, Daewon Kang, Chansoo Kang, Hoonseop KIM, Sangki Nam +3 more | 2024-03-26 |