Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431341 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Kyunghyun Kim +3 more | 2025-09-30 |
| 12125687 | System of semiconductor process and control method thereof | Youngdo Kim, Sungyong Lim, Daewon Kang, Sungyeol Kim, Sangki Nam +3 more | 2024-10-22 |
| 11940620 | Method of cleaning collector of EUV light source system | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Hoonseop KIM +3 more | 2024-03-26 |