Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vasily Pashkovskiy, Chansoo Kang, Youngdo Kim, Hoonseop KIM, Sangki Nam +2 more | 2024-09-10 |
| 6870896 | Dark-field phase contrast imaging | — | 2005-03-22 |