Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Namkyun Kim, Seungbo Shim, Donghyeon Na, Naohiko Okunishi +3 more | 2025-02-11 |
| 12183555 | Substrate processing apparatus and method of manufacturing semiconductor device using the same | Seunghan Baek, Sangki Nam, Namkyun Kim, Kwonsang Seo, Kuihyun Yoon | 2024-12-31 |
| 10818503 | Method of etching at low temperature and plasma etching apparatus | Cheonkyu Lee, Moonseok Kim, Iksu Byun, Changwoo SONG, Seongha JEONG | 2020-10-27 |