Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334309 | Filter device and plasma processing apparatus | Nozomu Nagashima | 2025-06-17 |
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Namkyun Kim, Seungbo Shim, Donghyeon Na, Dongseok Han +3 more | 2025-02-11 |
| 12210045 | Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig | Byeongsang Kim, Dougyong Sung, Sungjin Kim, Yunhwan Kim, Inseok Seo +2 more | 2025-01-28 |
| 11908664 | Plasma processing apparatus | Nozomu Nagashima, Tomoyuki Takahashi | 2024-02-20 |
| 11699576 | Filter device and plasma processing apparatus | — | 2023-07-11 |
| 11694881 | Stage and plasma processing apparatus | Hiroki Endo, Katsuyuki Koizumi | 2023-07-04 |
| 11538660 | Plasma processing apparatus and method of fabricating semiconductor device using same | Yoong Chung, Nam-Kyun Kim, Kyung-Sun Kim, Seung Bo Shim, Sang Ho Lee +1 more | 2022-12-27 |
| 11501958 | Plasma processing apparatus | Nozomu Nagashima, Tomoyuki Takahashi | 2022-11-15 |
| 11495443 | Filter device and plasma processing apparatus | Nozomu Nagashima | 2022-11-08 |
| 11456160 | Plasma processing apparatus | Katsumi Sekiguchi, Ryuichi Yui | 2022-09-27 |
| 11145490 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Joji TAKAYOSHI, Shinya Morikita | 2021-10-12 |
| 11037762 | Plasma processing apparatus | Yohei Yamazawa, Hironobu Misawa, Hidehito Soeta | 2021-06-15 |
| 10897808 | Filter device and plasma processing apparatus | Nozomu Nagashima | 2021-01-19 |
| 10886109 | Stage and plasma processing apparatus | Hiroki Endo, Katsuyuki Koizumi | 2021-01-05 |
| 10763087 | Plasma processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Norinao TAKASU, Etsuji Ito, Akihiro Yokota | 2020-09-01 |
| 10665416 | Substrate processing apparatus | Shinji Kubota, Yosuke Tamuro, Shota Kaneko | 2020-05-26 |
| 10651813 | Method for designing filter | Nozomu Nagashima, Eiichiro Kikuchi | 2020-05-12 |
| 10546723 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Joji TAKAYOSHI, Shinya Morikita | 2020-01-28 |
| 10332728 | Plasma processing apparatus | — | 2019-06-25 |
| 10096454 | Plasma processing apparatus | Nozomu Nagashima | 2018-10-09 |
| 10074519 | Plasma processing apparatus and filter unit | Keiki Ito, Masaki Nishikawa, Junichi Shimada, Ken Koyanagi | 2018-09-11 |
| 9754766 | Plasma processing apparatus | — | 2017-09-05 |
| 9646867 | Plasma processing apparatus, power supply unit and mounting table system | Masahiko Konno, Masayuki SHINTAKU, Takashi Suzuki, Michitaka Aita, Taizo Okada +2 more | 2017-05-09 |
| 9530619 | Plasma processing apparatus and filter unit | — | 2016-12-27 |
| 9275837 | Plasma processing apparatus | Yohei Yamazawa, Naoki Matsumoto, Masahide Iwasaki | 2016-03-01 |