Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12168825 | Film formation method and film formation device | Ken Itabashi, Ryota IFUKU, Takaaki Kato, Kazuki Yamada | 2024-12-17 |
| 10815568 | Gas distribution device and processing apparatus | Takumi Kabe | 2020-10-27 |
| 10665428 | Plasma processing apparatus | Naoki Matsumoto | 2020-05-26 |
| 10504698 | Plasma processing apparatus | Masayuki Kohno, Ryou Son, Naoki Matsumoto, Jun Yoshikawa, Ippei Shimizu +4 more | 2019-12-10 |
| 10490443 | Selective film forming method and method of manufacturing semiconductor device | Yumiko Kawano, Shuji AZUMO, Hiroki Murakami, Tadahiro Ishizaka, Koji Akiyama +2 more | 2019-11-26 |
| 10312057 | Plasma processing apparatus | Masayuki Kohno, Yusuke Yoshida, Naoki Matsumoto, Ippei Shimizu, Naoki Mihara +3 more | 2019-06-04 |
| 9761418 | Plasma processing apparatus | Masayuki SHINTAKU, Takashi Suzuki, Masahiko Konno, Taizo Okada, Hideo Kato +1 more | 2017-09-12 |
| 9646867 | Plasma processing apparatus, power supply unit and mounting table system | Masahiko Konno, Masayuki SHINTAKU, Takashi Suzuki, Taizo Okada, Naohiko Okunishi +2 more | 2017-05-09 |
| 9574270 | Plasma processing apparatus | Jun Yoshikawa | 2017-02-21 |
| 9343270 | Plasma processing apparatus | Toshihisa Nozawa, Jun Yoshikawa, Masahiro Yamazaki, Takehisa Saito, Fumihiko Kaji +1 more | 2016-05-17 |
| 9324542 | Plasma processing method and plasma processing apparatus | Naoki Matsumoto, Yugo Tomita, Naoki Mihara, Kazuki Takahashi, Jun Yoshikawa +5 more | 2016-04-26 |