Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351905 | Film forming method and film forming apparatus | Makoto Wada, Nobutake KABUKI, Takashi Matsumoto, Hiroshi Terada, Genji Nakamura | 2025-07-08 |
| 12168825 | Film formation method and film formation device | Michitaka Aita, Ken Itabashi, Takaaki Kato, Kazuki Yamada | 2024-12-17 |
| 12163898 | Method and apparatus for detecting abnormal growth of graphene | Takashi Matsumoto, Akira Fujio, Kousaku Saito | 2024-12-10 |
| 12116280 | Method and apparatus for forming graphene structure | Takashi Matsumoto | 2024-10-15 |
| 12037246 | Method for detecting abnormal growth of graphene, measurement apparatus, and film formation system | Takashi Matsumoto, Akira Fujio, Shin KONO | 2024-07-16 |
| 12018375 | Flim forming method of carbon-containing film by microwave plasma | Takashi Matsumoto, Masahito Sugiura, Makoto Wada | 2024-06-25 |
| 12014907 | Method and device for forming graphene structure | Takashi Matsumoto, Masahito Sugiura | 2024-06-18 |
| 11972929 | Processing apparatus and film forming method | Makoto Wada, Takashi Matsumoto, Masahito Sugiura, Hirokazu Ueda | 2024-04-30 |
| 11302576 | Method of making a semiconductor device including a graphene barrier layer between conductive layers | Makoto Wada, Takashi Matsumoto, Masahito Sugiura | 2022-04-12 |
| 11091836 | Graphene structure forming method and graphene structure forming apparatus | Takashi Matsumoto | 2021-08-17 |
| 10700006 | Manufacturing method of nickel wiring | Hiroaki Kawasaki, Takashi Matsumoto, Hiroyuki Nagai | 2020-06-30 |
| 9702039 | Graphene forming method | Daisuke Nishide, Takashi Matsumoto, Munehito KAGAYA | 2017-07-11 |