Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387926 | Selective film formation using self-assembled monolayer | Zeyuan NI, Yumiko Kawano, Taiki KATO, Shinichi Ike | 2025-08-12 |
| 12341004 | Film formation method and film formation apparatus | Yumiko Kawano, Shinichi Ike | 2025-06-24 |
| 12183572 | Film formation method and film formation device | Yumiko Kawano, Shinichi Ike | 2024-12-31 |
| 12152304 | Film forming method for forming self-assembled monolayer on substrate | Shinichi Ike, Yumiko Kawano | 2024-11-26 |
| 11830741 | Method for forming film | Shinichi Ike, Yumiko Kawano, Hiroki Murakami | 2023-11-28 |
| 11788185 | Film formation method and film formation device | Shinichi Ike, Yumiko Kawano | 2023-10-17 |
| 11598001 | Film forming method | Shinichi Ike, Yumiko Kawano | 2023-03-07 |
| 11417514 | Film forming method and film forming apparatus | Yuichiro WAGATSUMA, Toyohiro KAMADA, Shinichi Ike | 2022-08-16 |
| 11041239 | Film forming method for SiC film | Taiki Katou, Yusaku Kashiwagi | 2021-06-22 |
| 10833166 | Semiconductor device including an MIS structure | Kenji Yamamoto, Masatoshi AKETA, Hirokazu Asahara, Takashi Nakamura, Takuji Hosoi +3 more | 2020-11-10 |
| 10790138 | Method and system for selectively forming film | — | 2020-09-29 |
| 10490443 | Selective film forming method and method of manufacturing semiconductor device | Yumiko Kawano, Hiroki Murakami, Michitaka Aita, Tadahiro Ishizaka, Koji Akiyama +2 more | 2019-11-26 |
| 9293543 | Film forming method and film forming apparatus | Yusaku Kashiwagi, Yuichiro Morozumi, Yu Wamura, Katsushige Harada, Kosuke Takahashi +3 more | 2016-03-22 |
| 8999102 | Substrate processing apparatus | Hidenori Miyoshi | 2015-04-07 |
| 8900991 | Film forming method and storage medium | Yasuhiko Kojima | 2014-12-02 |
| 8785311 | Film forming method, semiconductor device, manufacturing method thereof and substrate processing apparatus therefor | Hidenori Miyoshi | 2014-07-22 |