Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11041239 | Film forming method for SiC film | Shuji AZUMO, Yusaku Kashiwagi | 2021-06-22 |
| 9926624 | Film forming method and film forming apparatus | Kazuki Yamada, Masato Morishima, Kenji Ouchi | 2018-03-27 |
| 9390933 | Etching method, storage medium and etching apparatus | Kensaku Narushima, Kohichi Satoh, Motoko NAKAGOMI, Eiichi KOMORI | 2016-07-12 |