Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12152298 | Powder conveying apparatus, gas supply apparatus, and method for removing powder | — | 2024-11-26 |
| 12018368 | Powder transfer apparatus, gas supply apparatus, and powder removal method | — | 2024-06-25 |
| 11965242 | Raw material supply apparatus and raw material supply method | Seishi Murakami, Tsuneyuki Okabe | 2024-04-23 |
| 11506321 | Pipe heating device and substrate processing apparatus | Tomohisa KIMOTO | 2022-11-22 |
| 11306847 | Valve device, processing apparatus, and control method | Tomohisa KIMOTO, Yuichi FURUYA, Takashi Kakegawa, Hideaki Fujita, Hiroyuki Mori | 2022-04-19 |
| 11286563 | Substrate processing apparatus, substrate processing system, and substrate processing method | — | 2022-03-29 |
| 11236425 | Method of processing substrate | Kennan Mo, Nuri CHOI, Kouichi SEKIDO, Katsumasa Yamaguchi | 2022-02-01 |
| 11193205 | Source material container | Yuichi FURUYA, Hiroyuki Mori, Einosuke Tsuda, Tomohisa KIMOTO | 2021-12-07 |
| 10612143 | Raw material gas supply apparatus and film forming apparatus | Hironori Yagi | 2020-04-07 |
| 10526702 | Film forming apparatus | Daisuke Toriya, Manabu Amikura | 2020-01-07 |
| 10094019 | Film forming apparatus | Daisuke Toriya, Manabu Amikura | 2018-10-09 |
| 10036090 | Trap mechanism, exhaust system, and film formation device | Hironori Yagi | 2018-07-31 |
| 9390933 | Etching method, storage medium and etching apparatus | Kensaku Narushima, Kohichi Satoh, Motoko NAKAGOMI, Taiki Katou | 2016-07-12 |