Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10526702 | Film forming apparatus | Daisuke Toriya, Eiichi KOMORI | 2020-01-07 |
| 10094019 | Film forming apparatus | Daisuke Toriya, Eiichi KOMORI | 2018-10-09 |
| 10096495 | Substrate processing apparatus | Toshiki HINATA | 2018-10-09 |
| 8143557 | Plane heater | Kazuo Shibata, Hiroo Kawasaki, Teruo Iwata | 2012-03-27 |
| 7931749 | Shower head and film-forming device using the same | Teruo Iwata | 2011-04-26 |
| 7718930 | Loading table and heat treating apparatus having the loading table | Hiroo Kawasaki, Teruo Iwata | 2010-05-18 |
| 7651584 | Processing apparatus | — | 2010-01-26 |