Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761075 | Substrate cleaning apparatus | Yukimasa Saito, Kazuya Dobashi, Kyoko Ikeda, Shuji Moriya | 2023-09-19 |
| 10786837 | Method for cleaning chamber of substrate processing apparatus | Yukimasa Saito, Kazuya Dobashi, Kyoko Ikeda, Shuji Moriya | 2020-09-29 |
| 10096495 | Substrate processing apparatus | Manabu Amikura | 2018-10-09 |