Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10968514 | Substrate mounting table | Kohichi Satoh, Hideaki Yamasaki, Junya Oka | 2021-04-06 |
| 10504743 | Method of etching film | Kohichi Satoh | 2019-12-10 |
| 10319585 | Film forming method | Kohichi Satoh, Shinya Okabe, Nagayasu Hiramatsu, Yuji Kobayashi | 2019-06-11 |
| 9390933 | Etching method, storage medium and etching apparatus | Kensaku Narushima, Kohichi Satoh, Eiichi KOMORI, Taiki Katou | 2016-07-12 |