Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626290 | Method, device, and system for etching silicon oxide film | Osamu Yokoyama, Kwangpyo Choi, Kazuki Hashimoto, Rio Shimizu, Takashi Kobayashi +1 more | 2023-04-11 |
| 11069512 | Film forming apparatus and gas injection member used therefor | Takashi Mochizuki, Hideaki Yamasaki, Nagayasu Hiramatsu, Kazuki DEMPOH | 2021-07-20 |
| 10738374 | Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus | Hideaki Yamasaki, Junya Oka, Yuuji Kobayashi, Takamichi Kikuchi | 2020-08-11 |
| 10731248 | Vacuum processing apparatus and operation method thereof | Hideaki Yamasaki, Takeshi ITATANI | 2020-08-04 |
| 10319585 | Film forming method | Kohichi Satoh, Nagayasu Hiramatsu, Motoko NAKAGOMI, Yuji Kobayashi | 2019-06-11 |
| 10044024 | Apparatus for manufacturing negative-electrode carbon material, and method for manufacturing negative-electrode carbon material using same | Tatsuo Umeno, Tadanori Tsunawaki, SHIROU OIE, JYUGO SUMITOMO, SHIGEYOSI NAKANO | 2018-08-07 |
| 9312532 | Negative electrode material for lithium ion secondary batteries, and method for producing same | Tatsuo Umeno, Tadanori Tsunawaki, Koutarou Mizuma, Shiroh Oie | 2016-04-12 |
| 9133548 | TiN film forming method and storage medium | Hideaki Yamasaki, Takeshi Yamamoto, Toru Onishi | 2015-09-15 |
| 8906471 | Method of depositing metallic film by plasma CVD and storage medium | — | 2014-12-09 |
| 5427102 | Active noise cancellation apparatus in MRI apparatus | Shin'ichi Shimode, Hiroshi Inouye, Norihide Saho, Masayuki Otsuka, Yukiji Iwase +3 more | 1995-06-27 |
| 5343713 | Active noise control apparatus for three-dimensional space | Shinichi Shimode, Ryouji Sato, Masamichi Hanada, Takao Senshu, Hirokiyo Terada +3 more | 1994-09-06 |