Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10968514 | Substrate mounting table | Kohichi Satoh, Hideaki Yamasaki, Motoko NAKAGOMI | 2021-04-06 |
| 10738374 | Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus | Shinya Okabe, Hideaki Yamasaki, Yuuji Kobayashi, Takamichi Kikuchi | 2020-08-11 |